Plasma electronics:
Makabe, T.
Plasma electronics: applications in microelectronic device fabrication / by T. Makabe and Z. Petrovic - New York : Taylor & Francis, 2006.
0750309768
Plasma Electronics Plasma Physics
Plasma electronics: applications in microelectronic device fabrication / by T. Makabe and Z. Petrovic - New York : Taylor & Francis, 2006.
0750309768
Plasma Electronics Plasma Physics