Plasma processes for semiconductor fabrication / (Record no. 96513)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00576nam a2200169Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 160808s2007 xx 000 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0521018005 |
| 041 ## - LANGUAGE CODE | |
| Language code of text/sound track or separate title | eng |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Hitchon, W. N. G. |
| 245 ## - TITLE STATEMENT | |
| Title | Plasma processes for semiconductor fabrication / |
| Statement of responsibility, etc | by W. N. G. Hitchon |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | Cambridge : |
| Name of publisher, distributor, etc | Cambridge University Press, |
| Date of publication, distribution, etc | 2007. |
| 490 ## - SERIES STATEMENT | |
| Series statement | Cambridge Studies in Semiconductor Physics and Microelectron |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Applied physics and engineering |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Plasma Processors - Semiconductor Fabrication |
| Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Date acquired | Full call number | Barcode | Date last seen | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|
| BL | British Library | British Library | 11/08/2016 | 621.38152 HIT | BL20107 | 11/06/2019 | Lending |