Hitchon, W. N. G. <br/><br/>
Plasma processes for semiconductor fabrication / 
by W. N. G. Hitchon 
 - Cambridge :  Cambridge University Press,  2007. 
 - Cambridge Studies in Semiconductor Physics and Microelectron .
<br/><br/><label>ISBN: </label>0521018005 
<br/><br/><label>Subjects--Index Terms: </label>Applied physics and engineering Plasma Processors - Semiconductor Fabrication 
<br/><br/><label>Dewey Class. No.: </label>621.38152