TY  - BOOK
AU  - Hitchon, W. N. G.
TI  - Plasma processes for semiconductor fabrication
T2  - Cambridge Studies in Semiconductor Physics and Microelectron
SN  - 0521018005
U1  - 621.38152 
PY  - 2007///
CY  - Cambridge
PB  - Cambridge University Press
KW  - Applied physics and engineering
KW  - Plasma Processors - Semiconductor Fabrication
ER  -