Plasma electronics: applications in microelectronic device fabrication / by T. Makabe and Z. Petrovic
Material type:
TextLanguage: English Publication details: New York : Taylor & Francis, 2006ISBN: 0750309768Subject(s): Plasma Electronics | Plasma PhysicsOther classification: C9B392
| Item type | Current library | Collection | Call number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
Reference
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Main Library | Reference | C9B392 P6 (Browse shelf(Opens below)) | Not for loan | 316533 |
Total holds: 0
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