Plasma processes for semiconductor fabrication / by W. N. G. Hitchon
Material type: TextLanguage: English Series: Cambridge Studies in Semiconductor Physics and MicroelectronPublication details: Cambridge : Cambridge University Press, 2007ISBN: 0521018005Subject(s): Applied physics and engineering | Plasma Processors - Semiconductor FabricationDDC classification: 621.38152Item type | Current library | Collection | Call number | Status | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|---|
Lending | British Library | BL | 621.38152 HIT (Browse shelf(Opens below)) | Available | BL20107 |
Total holds: 0
There are no comments on this title.