Plasma processes for semiconductor fabrication / by W. N. G. Hitchon
Material type:
TextLanguage: English Series: Cambridge Studies in Semiconductor Physics and MicroelectronPublication details: Cambridge : Cambridge University Press, 2007ISBN: 0521018005Subject(s): Applied physics and engineering | Plasma Processors - Semiconductor FabricationDDC classification: 621.38152
| Item type | Current library | Collection | Call number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
Lending
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British Library | BL | 621.38152 HIT (Browse shelf(Opens below)) | Available | BL20107 |
Total holds: 0
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